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HEPA Filtered Clean Air Ovens

Our range of clean air ovens from JSR are mechanical convection ovens equipped with HEPA Filters (Class H14) mounted in the laminar air path to remove particles up to 99.995%. This keeps the oven chamber as clean as a clean room.

Applications include:

  • Drying or curing dust sensitive materials such as electronic components or medical parts
  • Semi-conductor chip cleaning
  • Display panel and wafer baking, which needs a particle free environment during heat treatment
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