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1 CFM Mini Manifold

1 CFM Mini Manifold™ allows a single particle counter to monitor up to six locations.

Using patent pending technology, Lighthouse Worldwide Solutions has created the industry’s smallest 1.0 CFM sequencing particle counting manifold system. When connected to a Lighthouse SOLAIR 1.0 CFM particle counter, the 1.0 CFM MiniManifold is the best-in-class solution for tool monitoring and qualification, mini-environment monitoring and even cart-based portable monitoring systems.

The 1.0 CFM MiniManifold allows a single particle counter to monitor up to 6 locations in a process tool or minienvironment at 1.0 CFM. The 1.0 CFM MiniManifoldTM consists of a manifold sequencing system with a built-in controller and an optional blower for purge flow. The controller communicates with the particle counter and can interface to a computer system or process tool via the RS-485 MODBUS communications protocol.

The external blower can be installed at a distance from the manifold, adding flexibility to its installation. Programming sequences for the 1.0 CFM MiniManifoldTM are user-defined for such functions as port sequence, purge duration, sample duration and hold time. Up to 200 data records, which include environmental data, can be stored in its built-in buffer.



  • Multiplexed Monitoring of up to 6 Locations
  • User Programmable Sampling
  • Interfaces with other existing Building Automation and Factory Management Systems
  • Stainless Steel Construction
  • Continuous Purge Including Sample Line
  • Includes Manifold Blower
  • RS-485/MODBUS
  • 2 Year Warranty
  • Cost Effective Price per Point
  • Monitors Large Areas
  • Easy System Integration
  • International Sales and Service Support
  • Low Cost of Ownership
  • Can Be Used as a Portable Monitoring System
  • Great Troubleshooting Tool for Contamination Control Engineers
  • Tool Qualification
  • Minienvironment Monitoring
  • Facility and Cleanroom Monitoring
  • Monitor SMIF and FIMS Enclosures
  • Verify Cleanroom Performance
  • Trend Analysis
  • Cleanroom Laundries
  • Cleanroom Packaging
  • Semiconductor
  • Aerospace
  • Hard Disk Drive Manufacturing
  • Pharmaceutical

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