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0.1 CFM Mini Manifold

Using patent pending technology, Lighthouse Worldwide Solutions has created the industry’s smallest 0.1 CFM sequencing particle counting manifold system. When connected to the Lighthouse REMOTE 2014P, 3014P or 5014P particle counter, the 0.1 CFM MiniManifold™ is the best-in-class solution for tool monitoring and qualification, mini-environment monitoring and even cart-based portable monitoring systems.

The 0.1 CFM MiniManifold™ allows a single particle counter to monitor up to 6 locations in a process tool or minienvironment at 0.1 CFM. The 0.1 CFM MiniManifold™ consists of a manifold sequencing system with a built-in controller and an optional mini-blower for purge flow. The controller communicates with the particle counter and can interface to a computer system or process tool via the RS-485 MODBUS communications protocol.

The optional external blower can be installed at a distance from the manifold, adding flexibility to its installation. Programming sequences for the 0.1 CFM MiniManifold™ are user-defined for such functions as port sequence, purge duration, sample duration and hold time. Up to 200 data records, which include environmental data, can be stored in its built-in buffer.


  • Multiplexed Monitoring of up to 6 Locations
  • User Programmable Settings
  • Interfaces with other existing Building Automation and Factory Management Systems
  • Stainless Steel Construction
  • Continuous Purge Including Sample Line
  • Provides Manifold Capability to the Remote “P” Series Counters
  • RS-485 MODBUS Output
  • 2 Year Warranty
  • Cost Effective Price per Point
  • Monitors Large Areas
  • Easy System Integration
  • International Sales and Service Support
  • Low Cost of Ownership
  • Can Be Used as a Portable Monitoring System
  • Tool Qualification
  • Mini-environment Monitoring
  • Cleanroom Monitoring
  • Facility Monitoring
  • SMIF and FIMS Enclosures Monitoring
  • Cleanroom Performance Verification
  • Trend Analysis
  • Cleanroom Laundries
  • Cleanroom Packaging
  • Semiconductor
  • Aerospace
  • Hard Disk Drive Manufacturing
  • Pharmaceutical Packaging and Manufacturing
  • Process Troubleshooting Tool for
  • Contamination Control Engineers

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