1 CFM Mini Manifold™ allows a single particle counter to monitor up to six locations.
Using patent pending technology, Lighthouse Worldwide Solutions has created the industry’s smallest 1.0 CFM sequencing particle counting manifold system. When connected to a Lighthouse SOLAIR 1.0 CFM particle counter, the 1.0 CFM MiniManifold™ is the best-in-class solution for tool monitoring and qualification, mini-environment monitoring and even cart-based portable monitoring systems.
The 1.0 CFM MiniManifold™ allows a single particle counter to monitor up to 6 locations in a process tool or minienvironment at 1.0 CFM. The 1.0 CFM MiniManifoldTM consists of a manifold sequencing system with a built-in controller and an optional blower for purge flow. The controller communicates with the particle counter and can interface to a computer system or process tool via the RS-485 MODBUS communications protocol.
The external blower can be installed at a distance from the manifold, adding flexibility to its installation. Programming sequences for the 1.0 CFM MiniManifoldTM are user-defined for such functions as port sequence, purge duration, sample duration and hold time. Up to 200 data records, which include environmental data, can be stored in its built-in buffer.
